＜USE＞

High precision Thickness Measurement for wafers like Si(silicon) and GaAs(gallium arsenide) for sem-iconductors, glasses and metals.

＜FEATURES＞

1. Air reflection measuring system. The thickness of the object can be measured by air feedingwithout hard material touching the object. Therefore, there is no risk of damaging the surfaceof the measuring object.
2.
Accurate measuring is possible by eliminating the effects of surface color and reflection of thin metal and insulation films.

3. Measuring is possible with wet object.
4. Accurate measuring is possible with mirror surface, transparent and translucent objects.
5. More accurate measuring is possible for curved surface objects, because our system usesthe upper and lower nozzles for thickness measuring.
　
(Can measure the curvature with optional tool and software. (*1) )

6. Can do measuring and fine adjustment of measuring parameters(*2) easily and simply.

＜ Measurment Principle＞

測定原理図

<SYSTEM BREAKDOWN>

Standard system consists of the following equipments:

① Thickness measuring equipment
1set
② Table (to be selected from several tables for your needs)
1set
③ Control box
1set
④ Switch box
1set
⑤ Display unit (7" color LCD touch panel)　or laptop PC for measuring control
1set
⑥ Connecting cables.
1set
⑦ Fine adjustment gauge (Select thickness)
1 peace

⑧ Standard software for measuring control
1set
and more options are available for your own use.

　

<Dimension Drawings>

This is the set up for measuring 300mm waferwith Y-axis table. Separate control box dimensions: 400x500x250 mm (W/H/D)

(Remarks)

*1 It may not be possible to measure curvatures depending on the curvature level and stiffness.Please contact us for further information.
*2 For fine adjustment of measuring parameters, standard blockgauges can also be used.
*3 The range of the thickness measuring is　within 10mm(max.).
　

　

NON-CONTACT THICKNESS MEASURING DEVICE

(For Wafers and Glasses Thickness Measurement )

　List of table choices and Optional accessory list

＜Choice of table for standard system>

Choose one table from the table list down below.

Table Type

Code
Stationary type TK☆-△
Manual type Y table (moves back and forｔｈ)

TMY☆-△
Manual type Y-θtable (moves back and forth and rotates ±120°) TMYR☆-△
Manual type X-Y table (moves back and for the, right and left) TMXY☆-△
Automatic type Y table (moves back and forth) TAY☆-△
Automatic type Y-θ table (moves back and forth and rotates ±120°) TAYR☆-△
Automatic type X-Y table (moves back and for the, right and left) TAXY☆-△
Custom made version (*Q) TZ
☆Size (Item code )　　△Material (Item code )

Size (Item code ) ２（０．５～２”）、５（３～５”）、８（５～８”）、１２（８～１２”）
Material (Item code ) A（Aluminum/Alumite plating）、P（POM）、E（PEEK）、S（SUS）、
　 F（PTFE）、J（CERAMICS）、Q（Special specification）
＜Options＞

Option　Name
Option Type
Details
Vacuum table ＶＮ.. Adsorption function is added to each table.(*1)
Laser marker ＬＭ..
IPoint the target of measuring location by laser marker.

Software for thickness distribution display
ＤＲ..
Three-dimensional graphic display of thickness distribution when measuring is done at multiple points.

Curvature measuring kit ＷＰ..
Software and hardware for curvature measuring

Customer's selected display format ＦＭ..
Measurement data can be displayed in accordance with customer's selected format.

Data transfer software ＬＮ..
IMeasurement data can be transferred to PC.

Bar code reader
ＢＲ..
Measurement data can be tied with bar code information. （*2）

Printer ＰＲ..
A measuring result is printed.

Ultra-thin nozzle
ＳＮ..
Using ultra-thin nozzle, it can measure small spots or grooves, such as the thickness measurement of MEMS..

Supply air refining apparatus ＤＡ..
Air refining apparatus, having air dryer and filter.
Vacuum generator
ＶＳ..
Vacuum generating apparatus for adsorption.（*3）

ＣtoＣ　automatic conveyance
ＣＺ..
It is a full automatic calculating system. （*4）

Fine adjustment gauge & Certificates ＧＳ..
A package of certificates for inspection, fine adjustment of measuring parameters and traceability.

Export conformity document ＥＤ..
Issuance of conformity document for export

Maintenance service contract
ＭＴ..
Annual inspection and maintenance service for five years

（*1）The source of a vacuum is not included in VN. You have to have your own vacuum line.
（*2）need to get FM option.
（*3）need to get VN option.
（*4）Separate discussion should be done to finalize detailed requirements of customers.
＜ＯＺＵＭＡ２２　Form notation ＞

　　　ＯＺＵＭＡ２２－Table Type－Option Type－Option Type－・・・

　　　（Example）　ＯＺＵＭＡ２２－ＴＭＹ５－Ａ－ＶＮ－ＦＭ　　　

＜Customization Request＞

　　　Please contact us when you need special customization of the systemfor your specific needs.

　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　2012.01.06　Ver.1

＜Send your inquiries to＞

　Sasaki-koki, Co, INC. 　　

about NON-CONTACT THICKNESS MEASURING DEVICE

(For Wafers and Glasses Thickness Measurement )

TOP

　

SASAKI KOKI Inc.
1-9-33 Shinomoge, Takatsu-ku, Kwasaki City, Kanagawa Pref. Zip-Code 213-0006 Japan

TEL +81-44-844-0338 　FAX +81-44-822-0922
E-MAIL to here　U.R.L. http://www.sasaki-koki.co.jp
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