金属部品加工.自動化省力化装置設計製作
佐々木工機株式会社
 

News Release!

NON-CONTACT THICKNESS MEASURING DEVICE

OZUMA22

(For Thickness Measurement )

 

<USE>

High precision Thickness Measurement for wafers like Si(silicon) and GaAs(gallium arsenide) for semiconductors, glasses and metals.

<FEATURES>

1. Air reflection measuring system. The thickness of the object can be measured by air feedingwithout hard material touching the object. Therefore, there is no risk of damaging the surfaceof the measuring object.
2.

Accurate measuring is possible by eliminating the effects of surface color and reflection of thin metal and insulation films.

3. Measuring is possible with wet object.
4. Accurate measuring is possible with mirror surface, transparent and translucent objects.
5. More accurate measuring is possible for curved surface objects, because our system usesthe upper and lower nozzles for thickness measuring.
 

(Can measure the curvature with optional tool and software. (*1) )

6. Can do measuring and fine adjustment of measuring parameters(*2) easily and simply.


<PERFORMANCE>

  Resolution          0.1μm
  Repetition accuracy    In the case 10 times continuous measuring is done,
                  Standard deviation(1σ) Less than 0.3μm
  Range of thickness    measurement.  max.10mm (*3)
  Power supply        AC100V 50/60Hz 3A  
  Air supply          Clean air 0.4MPa 20NL/min. (*4)
  


<SYSTEM BREAKDOWN>

Standard system consists of the following equipments:

@ Thickness measuring equipment
1set
A Table (to be selected from several tables for your needs)
1set
B Control box
1set
C Switch box
1set
D Display unit (7" color LCD touch panel) or laptop PC for measuring control
1set
E Connecting cables.
1set
F Fine adjustment gauge (Select thickness)

1 peace

G Standard software for measuring control
1set

and more options are available for your own use.

 

<Dimension Drawings>

This is the set up for measuring 300mm waferwith Y-axis table. Separate control box dimensions: 400x500x250 mm (W/H/D)

(Remarks)

*1 It may not be possible to measure curvatures depending on the curvature level and stiffness.Please contact us for further information.
*2 For fine adjustment of measuring parameters, standard blockgauges can also be used.
*3 The range of the thickness measuring is within 10mm(max.).

 

 


NON-CONTACT THICKNESS MEASURING DEVICE

(For Thickness Measurement)

 List of table choices and Optional accessory list

<Choice of table for standard system>

Choose one table from the table list down below.

Table Type

Code
Stationary type TK☆-△

Manual type Y table (moves back and forth)

TMY☆-△
Manual type Y-θtable (moves back and forth and rotates ±120°) TMYR☆-△
Manual type X-Y table (moves back and for the, right and left) TMXY☆-△
Automatic type Y table (moves back and forth) TAY☆-△
Automatic type Y-θ table (moves back and forth and rotates ±120°) TAYR☆-△
Automatic type X-Y table (moves back and for the, right and left) TAXY☆-△
Custom made version (*Q) TZ

☆Size (Item code )  △Material (Item code )

Size (Item code ) 2(0.5〜2”)、5(3〜5”)、8(5〜8”)、12(8〜12”)
Material (Item code ) A(Aluminum/Alumite plating)、P(POM)、E(PEEK)、S(SUS)、
  F(PTFE)、J(CERAMICS)、Q(Special specification)

<Options>

Option Name
Option Type
Details
Vacuum table VN.. Adsorption function is added to each table.(*1)
Laser marker LM..

IPoint the target of measuring location by laser marker.

Software for thickness distribution display
DR..

Three-dimensional graphic display of thickness distribution when measuring is done at multiple points.

Curvature measuring kit WP..

Software and hardware for curvature measuring

Customer's selected display format FM..

Measurement data can be displayed in accordance with customer's selected format.

Data transfer software LN..

IMeasurement data can be transferred to PC.

Bar code reader
BR..

Measurement data can be tied with bar code information. (*2)

Printer PR..

A measuring result is printed.

Ultra-thin nozzle
SN..

Using ultra-thin nozzle, it can measure small spots or grooves, such as the thickness measurement of MEMS..

Supply air refining apparatus DA..

Air refining apparatus, having air dryer and filter.

Vacuum generator
VS..

Vacuum generating apparatus for adsorption.(*3)

CtoC automatic conveyance
CZ..

It is a full automatic calculating system. (*4)

Fine adjustment gauge & Certificates GS..

A package of certificates for inspection, fine adjustment of measuring parameters and traceability.

Export conformity document ED..

Issuance of conformity document for export

Maintenance service contract
MT..

Annual inspection and maintenance service for five years

(*1)The source of a vacuum is not included in VN. You have to have your own vacuum line.
(*2)need to get FM option.
(*3)need to get VN option.
(*4)Separate discussion should be done to finalize detailed requirements of customers.

<OZUMA22 Form notation >

   OZUMA22−Table Type−Option Type−Option Type−・・・

   (Example) OZUMA22−TMY5−A−VN−FM   

<Customization Request>

   Please contact us when you need special customization of the systemfor your specific needs.

                                                         2012.01.06 Ver.1

<Send your inquiries to>

 Sasaki-koki, Co, INC.   

about NON-CONTACT THICKNESS MEASURING DEVICE

TOP

 

SASAKI KOKI Co,INC.

1-9-33 Shinomoge, Takatsu-ku, Kwasaki City, Kanagawa Pref. Zip-Code 213-0006 Japan

TEL 044-844-0338    FAX 044-822-0922
E-MAIL to here U.R.L. http://www.sasaki-koki.co.jp

Part processing (Machining center、CNC Lathe、CNC Fraise、Discharge Machine、Welding, etc.)                 Automation machines, Laborsaving machines, Manufacturing with flexible designing.